We believe it is important to keep in mind
what a planetary rotation is supposed to
provide - improved thin-film uniformity. You
can achieve greater capacity and larger
substrate sizes without using a planetary; the
only reason to accept the decreased capacity
and increased complexity is to have significant
improvements in film distribution.
Our rotations are built with careful analysis of
planetary gear ratios and integrated mask
mounts for precise placement and control of
film uniformity. We include features for easy
bearing lubrication, heavy-duty construction to
minimize downtime, carefully-toleranced
components to maintain accurate substrate
heights, and integrated multi-point crystal
We understand the impact of a tilted planet, a
planet that is at a slightly different height, or
improper gear ratios and design accordingly.
Our planetary rotations are built for precision,
quality, and the utmost in reliability. We err
on the side of too good, instead of not good
In addition to standard planetary rotation
designs for typical chambers, we also provide
custom systems to better meet your needs.
We will provide just the rotation system, or
we will include custom-designed and refined
uniformity masks to provide optimal performance in your system.
Talk to us about what you need your
planetary to accomplish - chances are, we
can do that.